JPH0643176Y2 - インライン式成膜装置 - Google Patents

インライン式成膜装置

Info

Publication number
JPH0643176Y2
JPH0643176Y2 JP10380989U JP10380989U JPH0643176Y2 JP H0643176 Y2 JPH0643176 Y2 JP H0643176Y2 JP 10380989 U JP10380989 U JP 10380989U JP 10380989 U JP10380989 U JP 10380989U JP H0643176 Y2 JPH0643176 Y2 JP H0643176Y2
Authority
JP
Japan
Prior art keywords
opening
substrate
film thickness
thin film
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10380989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341845U (en]
Inventor
達彦 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP10380989U priority Critical patent/JPH0643176Y2/ja
Publication of JPH0341845U publication Critical patent/JPH0341845U/ja
Application granted granted Critical
Publication of JPH0643176Y2 publication Critical patent/JPH0643176Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP10380989U 1989-09-04 1989-09-04 インライン式成膜装置 Expired - Lifetime JPH0643176Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10380989U JPH0643176Y2 (ja) 1989-09-04 1989-09-04 インライン式成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10380989U JPH0643176Y2 (ja) 1989-09-04 1989-09-04 インライン式成膜装置

Publications (2)

Publication Number Publication Date
JPH0341845U JPH0341845U (en]) 1991-04-22
JPH0643176Y2 true JPH0643176Y2 (ja) 1994-11-09

Family

ID=31652630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10380989U Expired - Lifetime JPH0643176Y2 (ja) 1989-09-04 1989-09-04 インライン式成膜装置

Country Status (1)

Country Link
JP (1) JPH0643176Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4792242B2 (ja) * 2005-05-27 2011-10-12 オリンパス株式会社 薄膜形成装置及び薄膜形成方法
JP4900057B2 (ja) * 2006-12-13 2012-03-21 株式会社デンソー 電子装置
FR3001160B1 (fr) * 2013-01-18 2016-05-27 Saint Gobain Procede d'obtention d'un substrat muni d'un revetement

Also Published As

Publication number Publication date
JPH0341845U (en]) 1991-04-22

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